本文利用Ar~ 激光倍频257.3nm进行扫描蚀刻Si、GaAs和Zn片,获得的最小光刻线宽为1.2μm,给出蚀刻深度与光强/扫描速度的关系曲线等......

A novel experiment method for chemical solubility determination was brought forward, in which optics and chemistry princ......

A laser-induced chemical vapor deposition (LICVD) nanometer equipment is designed and fabricated. The design conception ......